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SEMI / STANDARDS & SAFETY

SEMI Standards

A practical reference for semiconductor equipment safety, engineer credentials and standards-led operations.

Explore the catalogue
01 / Overview

Standards that move with the industry

For more than 50 years, SEMI has developed international standards for the semiconductor industry. More than 1,300,000 volunteers from over 2,260 companies contribute to SEMI technical standards activities, representing the needs of the industry worldwide.

SEMI has established 20 standards committees and 216 working groups. Together they have developed more than 1,100 standards and safety guidelines across 16 categories, widely used by IDMs, wafer fabs, assembly and test plants, and equipment makers.

50+years of standards work
1.3M+volunteers
20standards committees
216working groups
1,100+standards and guidelines
16major categories
SEMI S-series standards

SEMI S-series standards

The SEMI S series is developed by the Environmental, Health and Safety Technical Committee. It applies to semiconductor materials and manufacturing equipment and provides the industry with a common language for reducing hazards across design, installation, operation and maintenance.

The series covers installation guidance, exhaust treatment, hazard labels, liquid heating, ventilation, qualification, ergonomics, risk assessment, decontamination, safety manuals, fire protection, interlocks, electrical design, ionizing radiation, laser classification and noise exposure.

1986The S series is first introduced
1991SEMI S2 is published
S2-0724Latest English edition noted in the supplied material
Why SEMI certification matters

Why SEMI certification matters

Meeting SEMI requirements is both a path to international compliance and a practical qualification signal used by leading chip manufacturers when introducing equipment. SEMI certification is recognized across the equipment and manufacturing ecosystem.

Typical equipment specifications include SEMI S2 equipment safety, SEMI S6 exhaust ventilation, SEMI F47 voltage sag immunity and SEMI S23 energy efficiency. The supplied material also references Intel, TSMC, TEL, YMTC, CXMT, NAURA, AMEC and ACM as industry examples.

02 / Standards library

Find your standard

Browse by code or topic. Open a record to review its scope and details.

30 of 30 standards
01SEMI S1Safety Guideline for Equipment Safety Labels02SEMI S2Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment03SEMI S3Safety Guideline for Process Liquid Heating Systems04SEMI S4Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing Cabinets05SEMI S5Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases06SEMI S6EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment07SEMI S7Safety Guideline for Evaluating Personnel and Company Qualifications08SEMI S8Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment09SEMI S10Safety Guideline for Risk Assessment and Risk Evaluation Process10SEMI S12Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination11SEMI S13Environmental, Health and Safety Guideline for Documents Provided to Equipment Users12SEMI S14Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment13SEMI S16Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life14SEMI S17Safety Guideline for Unmanned Transport Vehicle Systems15SEMI S18Environmental, Health, and Safety Guideline for Flammable Silicon Compounds16SEMI S19Safety Guideline for Training of Equipment Installation, Maintenance and Service Personnel17SEMI S21Safety Guideline for Worker Protection18SEMI S22Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment19SEMI S23Guide for Energy, Utilities and Materials Use Efficiency20SEMI S24Safety Guideline for Multi-Employer Work Areas21SEMI S25Safety Guideline for Hydrogen Peroxide Storage and Handling Systems22SEMI S26Environmental, Health, and Safety Guideline for FPD Manufacturing Systems23SEMI S27Safety Guideline for the Contents of ESH Evaluation Reports24SEMI S28Safety Guideline for Robots and Load Ports25SEMI S29Guide for Fluorinated Greenhouse Gas Emission Characterization and Reduction26SEMI S30Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing27SEMI F14Guide for the Design of Gas Source Equipment Enclosures28SEMI F15Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas29SEMI F42Test Method for Semiconductor Processing Equipment Voltage Sag Immunity30SEMI F47Specification for Semiconductor Processing Equipment Voltage Sag Immunity
03 / Credential levels

A path for safety professionals

SEMI Safety Standards Engineer credentials

The semiconductor manufacturing safety standards are global standards and guidelines developed by the SEMI Environmental, Health and Safety Technical Committee. They apply to semiconductor materials and equipment manufacturing and define essential safety specifications for the industry.

The SEMI Registered Safety Engineer assessment is based on SEMI S7. It provides a professional qualification for people working in semiconductor equipment design, manufacturing and use, and supports the safety-factory certification work of fabs and equipment companies.

01L1

Foundation credential

Associate degree or above, at least 1 year of semiconductor manufacturing experience, and valid course-hour evidence.

02L2

Applied practitioner credential

Bachelor degree or above, at least 3 years of semiconductor manufacturing experience, valid course-hour evidence and a valid L1 certificate.

03L3

Senior practitioner credential

Bachelor degree or above, at least 5 years of semiconductor manufacturing experience, valid course-hour evidence and a valid L2 certificate.

Application and registration

Before completing the SEMI Safety Standards Engineer assessment application, read the MooreCharm website privacy policy. If you agree, send the completed application to einwu@semi.org.

A clear progression

A clear progression

01

Build the record

Keep valid course-hour evidence and relevant semiconductor manufacturing experience.

02

Apply for assessment

Complete the SEMI Safety Standards Engineer assessment application and submit the required evidence.

03

Progress by credential

Use a valid L1 or L2 certificate as the prerequisite for the next level.

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The supplied material notes that the online query service can be used to confirm whether the documents required for an application are available.

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